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SFM3000-200C
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Electrical
| Sensor Type | 气体 | Voltage - Supply | 5 V |
| Minimum Load Required | -200 slm | ||
Mechanical
| Material | 环氧、金、聚氨酯、PPE+PS 混合、Si、Si3n4、Siox、不锈钢（已退火） | Maximum Pressure | 1.3bar |
| Outside Pipe Diameter (Min) | 22 mm | ||
Product Info
| Type | 流量计 | Series | SFM3000 |
| Connection Type | 2 线 I2C | Other Specifications | 200 slm |
Environmental
| Operating Temperature | +80°C | ||